Vapor Pressure of Dichlorosilane, Trichlorosilane, and Tetrachlorosilane from 300 K to 420 K Marsh, K.N.; Morris, T.K.; Peterson, G.P.; Hughes, T.J.; Ran, Q.; Holste, J.C.; Journal of Chemical & Engineering Data 2016, 61, 2799-2804
- Journal: Journal of Chemical & Engineering Data
- Sample Quantity(ies): Vapor pressure
- Methodology: Diaphragm manometer
- Phase(s): Liquid
- Substances:
Data
| T (K) | P (kPa) |
| 300.001 | 216.5 |
| 339.991 | 625.3 |
| 359.983 | 981.9 |
| 329.994 | 485.8 |
| 349.990 | 784.7 |
| 359.988 | 978.0 |
| 369.984 | 1205.0 |
| 349.996 | 785.0 |
| 369.992 | 1205.0 |
| 379.985 | 1469.0 |
| 299.999 | 212.1 |
| 319.998 | 380.4 |
| 309.992 | 284.3 |
| 349.992 | 786.4 |
| 359.992 | 982.2 |
| 369.992 | 1209.0 |
| 379.989 | 1479.0 |
| 389.994 | 1779.0 |
| 299.993 | 214.4 |
| 319.993 | 377.9 |
| 339.998 | 628.6 |
| 359.991 | 985.9 |
| 330.017 | 492.2 |
| 379.990 | 1477.0 |
| 389.991 | 1784.0 |
| 299.988 | 213.33 |
| 339.991 | 626.4 |
| 379.990 | 1475.9 |
| 389.990 | 1780.5 |
| 399.989 | 2099.0 |
| 410.004 | 2534.0 |
| 299.993 | 216.53 |
| 319.995 | 381.43 |
| 299.994 | 214.5 |
| 339.991 | 631.6 |
| 359.991 | 990.3 |
| 379.992 | 1484.0 |
| 399.992 | 2138.0 |
| 409.984 | 2559.0 |
| 419.991 | 3016.0 |
| 319.983 | 377.6 |
| 339.992 | 625.6 |
| 349.989 | 789.0 |
| 299.999 | 214.2 |
| 319.996 | 377.3 |
1327; dichlorosilane; 00461