Vapor Pressure of Dichlorosilane, Trichlorosilane, and Tetrachlorosilane from 300 K to 420 K Marsh, K.N.; Morris, T.K.; Peterson, G.P.; Hughes, T.J.; Ran, Q.; Holste, J.C.; Journal of Chemical & Engineering Data 2016, 61, 2799-2804
- Journal: Journal of Chemical & Engineering Data
- Sample Quantity(ies): Vapor pressure
- Methodology: Diaphragm manometer
- Phase(s): Liquid
- Substances:
Data
| T (K) | P (kPa) |
| 323.006 | 407.8 |
| 343.007 | 672.6 |
| 362.990 | 1052.1 |
1327; dichlorosilane; 00461