Vapor Pressure of Dichlorosilane, Trichlorosilane, and Tetrachlorosilane from 300 K to 420 K Marsh, K.N.; Morris, T.K.; Peterson, G.P.; Hughes, T.J.; Ran, Q.; Holste, J.C.; Journal of Chemical & Engineering Data 2016, 61, 2799-2804
- Journal: Journal of Chemical & Engineering Data
- Sample Quantity(ies): Vapor pressure
- Methodology: Diaphragm manometer
- Phase(s): Liquid
- Substances:
Data
| T (K) | P (kPa) |
| 332.991 | 113.02 |
| 339.996 | 139.15 |
| 340.001 | 138.98 |
| 350.015 | 185.05 |
| 359.999 | 241.64 |
| 370.001 | 311.49 |
| 379.998 | 395.69 |
| 389.995 | 495.9 |
| 399.996 | 614.0 |
1329; silicon tetrachloride; 00463