• Synthesis and characterization of organosilicon compounds as novel precursors for CVD processes

Data

[{'id': 64394, 'desc': '1 datapoints in 1 series, <b>quantities:</b> Boiling point at pressure, <b>system:</b> trimethylphenylsilane'}, {'id': 64395, 'desc': '17 datapoints in 1 series, <b>quantities:</b> Vapor pressure, <b>system:</b> trimethylphenylsilane'}, {'id': 64396, 'desc': '1 datapoints in 1 series, <b>quantities:</b> Boiling point at pressure, <b>system:</b> trimethyl(phenylamino)silane'}, {'id': 64397, 'desc': '18 datapoints in 1 series, <b>quantities:</b> Vapor pressure, <b>system:</b> trimethyl(phenylamino)silane'}, {'id': 64398, 'desc': '1 datapoints in 1 series, <b>quantities:</b> Boiling point at pressure, <b>system:</b> (benzylamino)trimethylsilane'}, {'id': 64399, 'desc': '1 datapoints in 1 series, <b>quantities:</b> Boiling point at pressure, <b>system:</b> N,N-bis(trimethylsilyl)aniline'}, {'id': 64400, 'desc': '27 datapoints in 1 series, <b>quantities:</b> Vapor pressure, <b>system:</b> N,N-bis(trimethylsilyl)aniline'}, {'id': 64401, 'desc': '22 datapoints in 1 series, <b>quantities:</b> Vapor pressure, <b>system:</b> 1,1,1,3,3,3-hexamethyldisilazane'}] temp"