Phase equilibrium data for potentially hazardous binary mixtures involving dichlorosilane, trichlorosilane and silicon-tetrachloride Nelson, W.M.; Naidoo, P.; Ramjugernath, D.; The Journal of Chemical Thermodynamics 2015, 91, 420-426
Data
T (K) P (kPa)
313.34 134.1
323.33 183.5
333.17 245.0
343.00 321.0
352.96 414.5
362.96 528.8
1328; trichlorosilane; 00462