Substance
- Substance Name: trichlorosilane
- Formula: Cl3HSi
- Molecular Weight: 135.45 g/mol
- Identifiers:
- casrn: 10025-78-2
- inchikey: ZDHXKXAHOVTTAH-UHFFFAOYSA-N
- inchi: InChI=1S/Cl3HSi/c1-4(2)3/h4H
- csmiles: [SiH](Cl)(Cl)Cl
- ismiles: [SiH](Cl)(Cl)Cl
- pubchemId: 24811
- iupacname: trichlorosilane
- wikidataId: Q419041
- chemspiderId: 23196
- dsstoxcmpId: DTXCID909301
- ecnumber: 233-042-5
trichlorosilane
Systems and Datasets
- trichlorosilane (Datasets: 2)
- Dataset 3 in paper 10.1021/acs.jced.6b00142 (Dataseries: 1, Datapoints: 12, Quantity: Vapor pressure)
- Dataset 2 in paper 10.1016/j.jct.2015.07.047 (Dataseries: 1, Datapoints: 6, Quantity: Vapor pressure)
- dichlorosilane + trichlorosilane (Datasets: 2)
- Dataset 4 in paper 10.1016/j.jct.2015.07.047 (Dataseries: 20, Datapoints: 40, Quantity: Vapor pressure)
- Dataset 5 in paper 10.1016/j.jct.2015.07.047 (Dataseries: 20, Datapoints: 40, Quantity: Mole fraction)
- trichlorosilane + silicon tetrachloride (Datasets: 2)
- Dataset 8 in paper 10.1016/j.jct.2015.07.047 (Dataseries: 18, Datapoints: 39, Quantity: Vapor pressure)
- Dataset 9 in paper 10.1016/j.jct.2015.07.047 (Dataseries: 18, Datapoints: 39, Quantity: Mole fraction)