Vapor Pressure of Dichlorosilane, Trichlorosilane, and Tetrachlorosilane from 300 K to 420 K Marsh, K.N.; Morris, T.K.; Peterson, G.P.; Hughes, T.J.; Ran, Q.; Holste, J.C.; Journal of Chemical & Engineering Data 2016, 61, 2799-2804
- Journal: Journal of Chemical & Engineering Data
- Sample Quantity(ies): Vapor pressure
- Methodology: Diaphragm manometer
- Phase(s): Liquid
- Substances:
Data
| T (K) | P (kPa) |
| 310.000 | 121.89 |
| 384.998 | 854.6 |
| 390.000 | 946.0 |
| 394.995 | 1044.2 |
| 320.000 | 167.53 |
| 329.996 | 225.35 |
| 340.000 | 297.4 |
| 350.000 | 385.6 |
| 359.995 | 492.1 |
| 369.996 | 619.6 |
| 379.995 | 770.2 |
| 380.499 | 778.2 |
1328; trichlorosilane; 00462